The JDSU Q Series lasers lead the market for high-power Q-switched diode-pumped UV lasers used for a wide variety of micromachining and solar cell processing applications. Whether for high pulse-energy processing of refractory materials such as silicon; high repetition rate processing of packaging materials such as Kapton; or patterning thin-film solar cells, the Q Series lasers deliver unsurpassed performance combined with industry-leading uptime.
Due to the self-stabilizing characteristics of intracavity UV harmonic generation, all Q Series lasers exhibit inherently high pulse-to-pulse energy and long-term output power stability. In addition, the excellent thermal stability of the unique Nd:YAG-based direct-coupled pump (DCP) architecture maintains exceptionally stable beam position and profile, which is important for processes requiring accurate feature placement. These advantages enable Q series lasers to achieve the tightest possible process tolerances for micromachining and other materials processing applications.
Key Features
- Highest commercially available pulse energy and peak power
- Tighter process control due to superior energy stability enabled by unique intracavity harmonic generation
- Capable of processing widest range of materials due to wide range of pulse energies and repetition rates
- High reliability due to low fluence in harmonic crystals and no cavity optic coatings exposed to UV
- 355 or 532 nm outputs available
Applications
- Solar cell processing
- Wafer scribing
- Full-cut thin wafer dicing
- Low-k dielectric grooving
- Micro via drilling
- Micromachining of silicon and metals